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High‑NA EUV's reduced field size is driving new innovation in optical proximity correction and mask synthesis.
Abstract: A physics-embedded deep learning method is proposed for radiation pattern recovery of phased array antennas with deformation. The proposed method primarily consists of two components: a ...
Abstract: This letter addresses the problem of beam pattern re-synthesis due to Transmit/Receive Module (TRM) malfunctions in active phased array antenna systems. Since TRM failures in full array ...
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